TY  - GEN
AU  - Shih, C K
AU  - Colton, R J
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1994-01-01 05:01:00
DO  - https://doi.org/10.6028/NIST.IR.5550
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1994
TI  - Industrial applications of scanned probe microscopy:
ER  -