TY - GEN AU - Klein, Claude A AU - Lu, Grant C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 1994-01-01 05:01:00 DO - https://doi.org/10.6028/NIST.IR.5418 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 1994 TI - Workshop on characterizing diamond films III::February 23-24, 1994, Gaithersburg, MD ER -