TY  - CONF
AU  - Vorburger, Theodore
AU  - Dixson, Ronald
AU  - Fu, Joseph
AU  - Orji, Ndubuisi
AU  - Feng, Shaw
AU  - Cresswell, Michael
AU  - Allen, Richard
AU  - Guthrie, William
AU  - Chu, Wei
C2  - Proc. 5th Int. Conf. on Precision, Meso, Micro, and Nano Engineering (COPEN 2007) (Allied Publishers Pvt. Ltd, Chennai, 2007), Trivandrum, IN
DA  - 2007-12-14
LA  - en
PB  - Proc. 5th Int. Conf. on Precision, Meso, Micro, and Nano Engineering (COPEN 2007) (Allied Publishers Pvt. Ltd, Chennai, 2007), Trivandrum, IN
PY  - 2007
TI  - Nano- and Atomic-Scale Length Metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=824603
ER  -