TY - GEN AU - Marshall, J C AU - Cresswell, M W AU - Ellenwood, C H AU - Linholm, L W AU - Roitman, P AU - Zaghloul, M E C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 1993-01-01 05:01:00 DO - https://doi.org/10.6028/NIST.IR.4889 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 1993 TI - The design guide for CMOS-on-SIMOX test chips NIST3 and NIST4: ER -