TY  - GEN
AU  - Marshall, Janet C
AU  - Parameswaran, M
AU  - Zaghloul, Mona E
AU  - Gaitan, Michael
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1992-01-01 05:01:00
DO  - https://doi.org/10.6028/NIST.IR.4845
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1992
TI  - Methodology for the computer-aided design of silicon micromachined devices in a standard CMOS process:
ER  -