TY  - JOUR
AU  - McClelland, Jabez
AU  - Gupta, R
AU  - Celotta, Robert
AU  - Porkolab, G
C2  - Applied Physics B-Lasers and Optics
DA  - 1998-01-01
LA  - en
M1  - 66
PB  - Applied Physics B-Lasers and Optics
PY  - 1998
TI  - Nanostructure Fabrication by Reactive-ion Etching of Laser-Focused Chromium on Silicon
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=620488
ER  -