TY  - JOUR
AU  - Dixson, Ronald
AU  - Boon, 
AU  - Orji, Ndubuisi
C2  - Measurement Science and Technology
DA  - 2014-08-12
LA  - en
M1  - 25
PB  - Measurement Science and Technology
PY  - 2014
TI  - Effects of Lateral Tip Control in CD-AFM Width Metrology
ER  -