TY  - GEN
AU  - Bullis, W Murray
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1969-01-01 05:01:00
DO  - https://doi.org/10.6028/NBS.TN.511
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1969
TI  - Measurement methods for the semiconductor device industry ::a summary of NBS activity
ER  -