TY - CONF AU - Reyes-Hernandez, Darwin AU - Halter, Michael AU - Hwang, Jeeseong C2 - Proceedings of Micro Total Analysis Systems 2013, Freiburg, -1 DA - 2013-10-27 LA - en PB - Proceedings of Micro Total Analysis Systems 2013, Freiburg, -1 PY - 2013 TI - Optical Coherence Tomography for Dimensional Metrology of Lab-on-a-chip devices ER -