TY  - GEN
AU  - Lee, Hae-Jeong
AU  - Wu, Wen-Li
AU  - Soles, Christopher L
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2004-01-01 05:01:00
DO  - https://doi.org/10.6028/NBS.SP.960-13
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2004
TI  - NIST recommended practice guide:pre characterization in low-k dielectric films using x-ray reflectivitiy
ER  -