TY  - JOUR
AU  - Molenbroek, E
AU  - Mahan, A
AU  - Johnson, E
AU  - Gallagher, A
C2  - Proc Materials Research Society
DA  - 1994-01-01
LA  - en
M1  - 336
PB  - Proc Materials Research Society
PY  - 1994
TI  - Factors influencing the quality of a-Si:H films deposited by the 'hot wire' technique
ER  -