TY  - VIDEO
AU  - Leone, S
AU  - Campos, F
AU  - Weaver, G
C2  - Proc 16th Symposium on Dry Processes Institute of Electrical Engineers of Japan
DA  - 1994-01-01
LA  - en
PB  - Proc 16th Symposium on Dry Processes Institute of Electrical Engineers of Japan
PY  - 1994
TI  - Silicon etching by kinetic-energy-enhanced chlorine
ER  -