TY  - GEN
AU  - Jerke, John M
AU  - Croarkin, M Carroll
AU  - Varner, Ruth N
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1982-01-01 05:01:00
DO  - https://doi.org/10.6028/NBS.SP.400-74
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1982
TI  - Interlaboratory study on linewidth measurements for antireflective chromium photomasks:
ER  -