TY - GEN AU - Wilson, R G AU - Jamba, D M C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 1982-01-01 05:01:00 DO - https://doi.org/10.6028/NBS.SP.400-71 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 1982 TI - Differential capacitance-voltage profiling of Schottky barrier diodes for measuring implanted depth distributions in silicon: ER -