TY  - GEN
AU  - Linholm, Loren W
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1981-01-01 05:01:00
DO  - https://doi.org/10.6028/NBS.SP.400-66
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1981
TI  - The design, testing, and analysis of a comprehensive test pattern for measuring CMOSSOS process performance and control:
ER  -