TY  - GEN
AU  - Novotny, Donald B
AU  - Ciarlo, Dino R
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1978-01-01 05:01:00
DO  - https://doi.org/10.6028/NBS.SP.400-46
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1978
TI  - Automated photomask inspection:
ER  -