TY  - GEN
AU  - Belzer, B J
AU  - Chandler-Horowitz, D
AU  - Novotny, D B
AU  - Candela, G A
AU  - Croarkin, M C
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1988-01-01 05:01:00
DO  - https://doi.org/10.6028/NBS.SP.260-109
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1988
TI  - Standard Reference Materials:Preparation and certification of SRM-2530, ellipsometric parameters ? and ? and derived thickness and refractive index of a silicon dioxide layer on silicon
ER  -