TY - GEN AU - Brombacher, W G C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 1970-01-01 05:01:00 DO - https://doi.org/10.6028/NBS.MONO.114 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 1970 TI - Survey of micromanometers: ER -