TY  - JOUR
AU  - Tanenbaum, D
AU  - Laracuente, A
AU  - Gallagher, A
C2  - Applied Physics Letters
DA  - 1996-01-01
LA  - en
M1  - 68
PB  - Applied Physics Letters
PY  - 1996
TI  - Nanoparticle deposition in hydrogenated amorphous silicon films during rf plasma deposition
ER  -