TY  - JOUR
AU  - Stutzin, G
AU  - Rozsa, K
AU  - Gallagher, A
C2  - Journal of Vacuum Science and Technology A
DA  - 1993-01-01
LA  - en
M1  - 11
PB  - Journal of Vacuum Science and Technology A
PY  - 1993
TI  - Deposition rates in dc diode sputtering
ER  -