TY  - GEN
AU  - Nyyssonen, D
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1987-01-01 05:01:00
DO  - https://doi.org/10.6028/NBS.IR.87-3618
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1987
TI  - Computer software for the computation of the scattered field and the optical microscope image of line objects patterned in thick layers:
ER  -