TY  - GEN
AU  - Carver, G P
AU  - Novotny, D B
AU  - Hershey, R
AU  - Luther, J E
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1987-01-01 05:01:00
DO  - https://doi.org/10.6028/NBS.IR.87-3579
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1987
TI  - Double-level metallization ::annual report for October 1, 1985 to September 30, 1986
ER  -