TY  - JOUR
AU  - Rozsa, K
AU  - Bano, G
AU  - Gallagher, A
C2  - IEEE Transactions on Plasma Science
DA  - 2001-01-01
LA  - en
M1  - 29
PB  - IEEE Transactions on Plasma Science
PY  - 2001
TI  - The location of very small particles in silane rf discharge
ER  -