TY  - GEN
AU  - Tighe, Nancy J
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1982-01-01 05:01:00
DO  - https://doi.org/10.6028/NBS.IR.82-2574
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1982
TI  - Analysis of oxide and oxidematrix interfaces in silicon nitride:
ER  -