TY  - GEN
AU  - Roitman, P
AU  - Albers, J
AU  - Ehrstein, J R
AU  - Myers, D R
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1981-01-01 05:01:00
DO  - https://doi.org/10.6028/NBS.IR.81-2398
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1981
TI  - Investigation of the two-dimensional shape of ion-implanted regions:
ER  -