TY - GEN AU - Carver, G P AU - Mattis, R L AU - Buehler, M G C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 1981-01-01 05:01:00 DO - https://doi.org/10.6028/NBS.IR.81-2234 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 1981 TI - Microelectronic test patterns NBS-12 and NBS-24: ER -