TY  - GEN
AU  - Tighe, N J
AU  - Kuroda, K
AU  - Mitchell, T E
AU  - Heuer, A H
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1980-01-01 05:01:00
DO  - https://doi.org/10.6028/NBS.IR.80-2075
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1980
TI  - In Situ oxidation of Y?O?-doped Si?N?:
ER  -