TY  - JOUR
AU  - Molenbroek, E
AU  - Mahan, A
AU  - Johnson, E
AU  - Gallagher, A
C2  - Journal of Applied Physics
DA  - 1996-01-01
LA  - en
M1  - 79
PB  - Journal of Applied Physics
PY  - 1996
TI  - Film quality in relation to deposition conditions of a-Si:H films deposited by the 'hot wire' method using highly diluted silane
ER  -