TY  - GEN
AU  - Mayo, Santos
AU  - Koyama, Richard Y
AU  - Leedy, Thomas F
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1978-01-01 05:01:00
DO  - https://doi.org/10.6028/NBS.IR.77-1404
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1978
TI  - Control of mobile-ion contamination in oxidation ambients for MOS device processing:
ER  -