TY  - GEN
AU  - Galloway, K F
AU  - Scace, R J
AU  - Walters, E J
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1981-01-01 05:01:00
DO  - https://doi.org/10.6028/NBS.IR.81-2230-3
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1981
TI  - Semiconductor technology program ::progress briefs
ER  -