TY  - GEN
AU  - Bullis, W Murray
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1993-01-01 05:01:00
DO  - https://doi.org/10.6028/NIST.SP.400-92
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1993
TI  - Evolution of silicon materials characterization:
ER  -