TY - GEN AU - Belzer, Barbara J AU - Blackburn, David L C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 1998-01-01 05:01:00 DO - https://doi.org/10.6028/NIST.SP.400-100 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 1998 TI - Thin film reference materials development: ER -