TY  - GEN
AU  - Varner, Ruth N
AU  - Vezzetti, Carol F
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1992-01-01 05:01:00
DO  - https://doi.org/10.6028/NIST.SP.260-117
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1992
TI  - Standard Reference Materials ::Antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems/
ER  -