TY  - GEN
AU  - Postek, Michael T.
AU  - Vladar, Andras E.
AU  - Ming, Bin
AU  - Bunday, Benjamin
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2014-03-01 05:03:00
DO  - https://doi.org/10.6028/NIST.SP.1170
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2014
TI  - Documentation for Reference Material (RM) 8820 : A Versatile, Multipurpose Dimensional Metrology Calibration Standard for Scanned Particle Beam, Scanned Probe and Optical Microscopy:
ER  -