TY  - JOUR
AU  - Gallagher, A
AU  - Howling, A
AU  - Hollenstein, C
C2  - Journal of Applied Physics
DA  - 2002-01-01
LA  - en
M1  - 91
PB  - Journal of Applied Physics
PY  - 2002
TI  - Anion reactions in silane plasma
ER  -