TY  - GEN
AU  - Pinillos, Joaquin V Martinez de
AU  - Obeng, Yaw S
AU  - Buckley, Michele
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2009-01-01 05:01:00
DO  - https://doi.org/10.6028/NIST.IR.7604
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2009
TI  - Semiconductor Microelectronics and Nanoelectronics Programs:
ER  -