TY  - GEN
AU  - Li, Ya-Shian
AU  - Eck, Brad Van
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2004-01-01 05:01:00
DO  - https://doi.org/10.6028/NIST.IR.7184
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2004
TI  - Semiconductor factory and equipment clock synchronization for e-manufacturing:
ER  -