TY  - GEN
AU  - Allocca, Clare
AU  - Freiman, Stephen
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2004-01-01 05:01:00
DO  - https://doi.org/10.6028/NIST.IR.7074
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2004
TI  - NanometrologyPrograms and accomplishments ::FY 2003 program and selected accomplishments
ER  -