TY  - GEN
AU  - Dagata, John A
AU  - Yokoyama, Hiroshi
AU  - Perez-Murano, Francesc
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2003-01-01 05:01:00
DO  - https://doi.org/10.6028/NIST.IR.7040
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2003
TI  - Workshop summary report ::scanning probe nanolithography workshop
ER  -