TY - GEN AU - Gayle, Frank W C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 2003-01-01 05:01:00 DO - https://doi.org/10.6028/NIST.IR.6971 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 2003 TI - Micro- & optoelectronics, annual report: ER -