TY  - JOUR
AU  - Doyle, J
AU  - Doughty, D
AU  - Gallagher, A
C2  - Journal of Applied Physics
DA  - 1992-01-01
LA  - en
M1  - 71
PB  - Journal of Applied Physics
PY  - 1992
TI  - Plasma chemistry in disilane discharges
ER  -