TY  - GEN
AU  - Pinillos, Stephen Knight
AU  - de, Michele Joaquin V Martinez
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2002-01-01 05:01:00
DO  - https://doi.org/10.6028/NIST.IR.6884
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2002
TI  - Silicon microelectronics programs at the National Institute of Standards and Technology::programs, activities, and accomplishments
ER  -