TY  - GEN
AU  - Kreider, K G
AU  - DeWitt, D P
AU  - Tsai, B K
AU  - Lojek, B
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2001-01-01 05:01:00
DO  - https://doi.org/10.6028/NIST.IR.6566
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2001
TI  - Workshop on temperature measurement of semiconductor wafers using thermocouples:
ER  -