TY - GEN AU - Pinillos, Joaquin V Martinez de AU - Knight, Stephen AU - Settle-Raskin, Alice C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 2000-01-01 05:01:00 DO - https://doi.org/10.6028/NIST.IR.6522 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 2000 TI - Silicon microelectronics programs at the National Institute of Standards and Technology::programs, activities, and accomplishments ER -