TY - GEN AU - Ling, Alice V AU - Vládar, András AU - Damazo, Bradley N AU - Donmez, M Alkan AU - Postek, Michael T C2 - , National Institute of Standards and Technology, Gaithersburg, MD DA - 2000-01-01 05:01:00 DO - https://doi.org/10.6028/NIST.IR.6498 LA - en PB - , National Institute of Standards and Technology, Gaithersburg, MD PY - 2000 TI - SEM Sentinel::SEM performance measurement system, part 1 ER -