TY  - CONF
AU  - Tarrio, Charles
AU  - Grantham, Steven
AU  - Cangemi, Marc
AU  - Vest, Robert
AU  - Lucatorto, Thomas
AU  - Harned, Noreen
C2  - Proceedings of SPIE, Vol. 7271, Alternative Lithographic Technologies, San Jose, CA
DA  - 2009-03-13
LA  - en
PB  - Proceedings of SPIE, Vol. 7271, Alternative Lithographic Technologies, San Jose, CA
PY  - 2009
TI  - EUVL dosimetry at NIST
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901663
ER  -