TY  - GEN
AU  - Wallace, J S
AU  - Fuller, E R Jr
AU  - Freiman, S W
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1996-01-01 05:01:00
DO  - https://doi.org/10.6028/NIST.IR.5903
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1996
TI  - Mechanical properties of aluminum nitride substrates:
ER  -