TY  - JOUR
AU  - Morelo, Diego Perez
AU  - Wang, Mingkang
AU  - Madhaven, Venkatesh
AU  - Sathisivan, Mogana
AU  - Tay, Charlie
AU  - Aksyuk, Vladimir
C2  - IEEE Journal of Microelectromechanical Systems
DA  - 2023-06-03 04:06:00
DO  - https://doi.org/10.1109/JMEMS.2023.3247300
LA  - en
M1  - 32
PB  - IEEE Journal of Microelectromechanical Systems
PY  - 2023
TI  - Integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep UV photolithography
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=935730
ER  -