TY  - JOUR
AU  - McCaughan, Adam
AU  - Tait, Alexander
AU  - Buckley, Sonia
AU  - Chiles, Jeff
AU  - Shainline, Jeff
AU  - Nam, Sae Woo
AU  - Oh, Dylan
C2  - Journal of Vacuum Science and Technology B
DA  - 2021-09-27 04:09:00
DO  -  https://doi.org/10.1116/6.0001203
LA  - en
PB  - Journal of Vacuum Science and Technology B
PY  - 2021
TI  - PHIDL: Python-based layout and geometry creation for nanolithography
ER  -