TY  - CONF
AU  - Ridzel, Olga
AU  - Yamane, Wataru
AU  - Mansaray, Ishiaka
AU  - Villarrubia, John S.
C2  - Proc. SPIE 12496, Metrology, Inspection, and Process Control XXXVII, San Jose, CA, US
DA  - 2023-04-27 04:04:00
DO  - https://doi.org/10.1117/12.2661103
LA  - en
PB  - Proc. SPIE 12496, Metrology, Inspection, and Process Control XXXVII, San Jose, CA, US
PY  - 2023
TI  - Model Validation for Scanning Electron Microscopy
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=936398
ER  -